Semiconductor Exposure Systems
Semiconductor exposure equipment is critical to the creation of the electronic devices that underpin the digital era. To advance the micro-optics that push semiconductor performance and functionality to new levels, Canon commercialized its innovative liquid immersion lithography and is now developing other cutting-edge technologies, such as extreme ultra-violet (EUV).
Semiconductor Exposure System
FPA-7000AS7
ArF scanning stepper
FPA-5510iZ
i-line stepper
LCD Exposure Systems
Canon is a leading manufacturer of the highproduction mirror projection aligners used in the manufacture of liquid crystal displays (LCDs). We have achieved the mass production of the world's largest highprecision concave mirror, enabling the manufacture of LCD panels for 57-inch widescreen televisions using a singleexposure process.
LCD Exposure System
MPAsp-H700
mirror projection aligner
- Liquid Immersion Exposure Technology
Taking semiconductor miniaturization to the next level
- Large Concave Mirror Technology
Large-panel technology in service of large-panel displays
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In contrast to conventional exposure methods in which air separates the projection lens from the semiconductor wafer, liquid immersion exposure replaces air with ultrapure water. This increases the refractive index, making possible more precise circuit patterning. Canon developed a unique liquid immersion technique by stabilizing the supply of ultrapure water to wafers. This technique was applied to the FPA-7000AS7 immersion lithography scanning stepper.
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Concave mirrors represent a critical component in the mirror projection aligners used to print transistors on liquid crystal panels. By combining polishing, processing, deposition, measurement, and other technologies, Canon has succeeded in massproducing the world's largest high-precision concave mirror, which has a diameter of 1.5 meters and surface processing precision of 0.015 micrometers.
Ophthalmic Equipment
Canon produces ophthalmic equipment that offers a unique and powerful combination of digital and optical technologies. Canon ophthalmic equipment meets the needs of the medical field by providing digital retinal cameras with high-resolution output in compact designs that minimize patient exposure and contribute to the early detection of eye disorders.
CF-1
digital retinal camera
TX-F
non-contact tonometer
Digital Radiography Systems
Digital X-ray photography is becoming increasingly common
in medical settings.
Canon offers upright, horizontal, and portable cassette-type systems that enable
X-ray photography under a wide range of conditions and is also now developing
dynamic image sensors.
Digital Radiography System
XDI-50C
digital radiography system
CXDI-40EC
digital radiography system
- LANMIT X-Ray Image Sensor
On the frontline of healthcare - Developed based on amorphous silicon sensor technology, the LANMIT X-ray image sensor makes possible the direct display of X-ray images on a monitor just three seconds after exposure. The LANMIT sensor, with an effective imaging area of 43 x 43 cm and 7.2-megapixel image resolution, is the world's largest X-ray image sensor.
Broadcast Equipment
As the global market leader in broadcast lenses, Canon is the brand of choice for television stations worldwide for capturing everything from live news and sports events to studio programming. Canon was quick to respond to the shift to high definition and digital broadcasting. We also offer remotecontrol pan/tilt camera systems and two-way communication systems.
Broadcast Lens
DIGISUPER 100AF
broadcast field lens
HJ18e x 28B
portable broadcast lens
- 100x zoom AF mechanism
Capture sports action with auto focus - Canon has applied decades of experience in auto-focus technology to perfecting a 100x zoom broadcast lens tailored for live sporting events. Canon's unique AF mechanism provides precise focus adjustment for professional cameramen even when following the fast movement of sporting events.
Components
Canon develops and manufactures in-house such key components as the CMOS sensor used in SLR cameras. We have also commercialized a number of compact and lightweight high-resolution components, including the micro laser interferometer, a device that measures nanometer-level displacement, and encoders that measure angle and length.
DS-80
micro laser interferometer
GM-1010/GM-1015
digital galvano scanner
