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| LASER ROTARY ENCODER |
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Canon’s original laser diffraction interference method achieves the compatibility of compactness and high accuracy. |
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| MICRO LINEAR ENCODER |
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Ultra-compactness has been achieved by making free use of minute semiconductor processing technology. |
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| SR ENCODER |
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Best suited rotary and linear encoder for automation apparatus, semiconductor manufacturing equipments. |
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| INTERPOLATOR BOARD/UNIT |
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Subjects analog output from encoders to mathematical operations and synthesis, achieving even higher resolution and accuracy. |
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| LASER DOPPLER VELOCITY SENSOR |
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Enables non contact measuring of movement speeds, length, speed irregularities, and rotation irregularities from still state |
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| MICRO LASER INTERFEROMETER |
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Non-contact displacement and vibration sensor capable of ultra-high resolution of 0.08nm with high speed response. |
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| LASER SCANNER |
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High precision galvano scanner obtained superb temperature characteristics by employing encoders and digital servo controllers. |
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| ROTARY POSITIONER |
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By motor encoder and optimum control, the unit achieves high steady speed, high resolution, high precision, and high stationary stability. |
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| AIR BEARING |
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Rotation Precision Exceeding Sub-Microns, High Rigidity, High Endurance - Canon's Air Bearings Have Them All |
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