ML-08, ML-16
LED light-diffraction interference method realize sub-micron
resolution
SPECIFICATIONS
ML-08
ML-16
Light source
LED
Resolution
0.8 µm
1.6 µm
Maximum response speed
240 mm / sec
480 mm / sec.
A,B phase
incremental
output signal
2 phase wave signal
signal type
Sinusoidal differential ( from Connector Nr. 2 )
Sinusoidal single end ( from Connector Nr. 3 )
Rectangle differential line driver ( from Connector Nr. 4 )
Z phase
reference
output signal
pulse signal at the
right end of scale
signal type
Differential Line Driver
pulse width
100 ± 20 µsec
Repeatability
±
0.8 µm or less
± 1.6
µm or less
Power supply voltage
DC + 5.00 V ± 5 %
Dimension
Encoder Head
16 x 23 x 16 mm
Connection Box
60
x 116 x 19.5 mm
Ambient
conditions
operating temperature
10
~ 40 ºC
storage temperature
-
10 ~ 50 ºC
humidity
max.
80 % RH (no condensation)
Scale
grating pitch (at 23 ºC)
1.6
µm
3.2 µm
length
10
mm
10, 50, 100
mm
linearity
accuracy *1
10
mm : ± 0.08 µm
10 mm : ±
0.09 µm
50 mm : ± 0.2 µm
100 mm : ± 0.3 µm
expansion coefficient
5.2 x 10-7 / ºC (Quartz)
10 mm : 5.2 x 10-7 / ºC (Quartz)
50, 100 mm : - 6.5 x 10-7 / ºC (Neoceram)
*1) Comparison measurement with Laser Interference at 23 ºC
