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LASER ROTARY ENCODER
MICRO LINEAR ENCODER
ML-08/80, ML-16/80
SR ENCODER
INTERPOLATOR BOARD/UNIT
LASER DOPPLER VELOCITY SENSOR
MICRO LASER INTERFEROMETER
LASER SCANNER
ROTARY POSITIONER
AIR BEARING
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ML-08/80, ML-16/80
Compact and low cost 80-fold Hybrid IC interpolator included

SPECIFICATIONS
ML-08/80 ML-16/80
Light source LED
Maximum Resolution 20-fold 0.04 µm 0.08 µm
40-fold 0.02 µm 0.04 µm
80-fold 0.01 µm 0.02 µm
Maximum response
speed
20-fold 80 mm / sec. 160 mm / sec.
40-fold 160 mm / sec. 320 mm / sec.
80-fold 160 mm / sec. 320 mm / sec.
A,B phase
incremental
output signal 2 phase rectangle wave signal
signal type Balanced Line Driver
Z phase
reference
output signal pulse signal at the right end of scale
signal type Differential Line Driver
pulse width 100 ± 20 µsec
Power supply voltage DC + 5.00 V ± 5 %
Dimension Encoder Head 16 x 23 x 16 mm
Interpolator Box 90 x 132 x 36 mm
Ambient conditions
operating temperature 10 ~ 40 ºC
storage temperature - 10 ~ 50 ºC
humidity max. 80 % RH (no condensation)
Scale grating pitch (at 23 ºC) 1.6 µm 3.2 µm
length 10 mm 10, 50, 100 mm
linearity accuracy *1 10 mm : ± 0.08 µm 10 mm : ± 0.09 µm
50 mm : ± 0.2 µm
100 mm : ± 0.3 µm
expansion coefficient 5.2 x 10-7 / ºC (Quartz) 10 mm : 5.2 x 10-7 / ºC
(Quartz)
50, 100 mm : - 6.5 x 10-7 / ºC
(Neoceram)
*1) Comparison measurement with Laser Interference at 23 ºC