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LASER ROTARY ENCODER
MICRO LINEAR ENCODER
ML-08/1000,
ML-16/1000
SR ENCODER
INTERPOLATOR BOARD/UNIT
LASER DOPPLER VELOCITY SENSOR
MICRO LASER INTERFEROMETER
LASER SCANNER
ROTARY POSITIONER
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ML-08/1000GA, ML-16/1000GA
Achieved high resolution of 0.8 nm, combined with CI-1000GA interpolation board

SPECIFICATIONS
  ML-08/1000GA
ML-16/1000GA
Light source
LED
Maximum Resolution
&
Maximum response speed
100-fold
8.0 nm, 80.0 mm / sec.
16.0 nm, 160.0 mm / sec.
125-fold 6.4 nm, 80.0 mm / sec.
12.8 nm, 160.0 mm / sec.
200-fold 4.0 nm, 68.8 mm / sec.
8.0 nm, 137.6 mm / sec.
250-fold 3.2 nm, 54.4 mm / sec.
6.4 nm, 108.8 mm / sec.
400-fold 2.0 nm, 34.4 mm / sec.
4.0 nm, 68.8 mm / sec.
500-fold 1.6 nm, 27.2 mm / sec.
3.2 nm, 54.4 mm / sec.
800-fold 1.0 nm, 16.8 mm / sec.
2.0 nm, 33.6 mm / sec.
1000-fold 0.8 nm, 13.6 mm / sec.
1.6 nm, 27.2 mm / sec.
A,B phase
incremental *1
output signal
2 phase rectangle wave signal
signal type Balanced Line Driver
up / down signal *1 pulse width
25 nsec ~ 3.2 µsec
signal type Balanced Line Driver
Z phase
reference
output signal
pulse signal at the right end of scale
signal type
Differential Line Driver
pulse width
100 ± 20 µsec
Power supply voltage
DC + 5.00 V ± 5 %
Dimension Encoder Head 16 x 23 x 16 mm
Interpolation board 65 x 140 mm
Ambient conditions operating temperature
10 ~ 40 ºC
storage temperature - 10 ~ 50 ºC
humidity max. 80 %RH (no condensation)
Scale grating pitch (at 23 ºC)
1.6 µm
3.2 µm
length 10 mm
10, 50, 100 mm
linearity accuracy *1 10 mm : ± 0.08 µm
10 mm : ± 0.09 µm
50 mm : ± 0.2 µm
100 mm : ± 0.3 µm
expansion coefficient 5.2 x 10-7 / ºC (Quartz)
10 mm : 5.2 x 10-7 / ºC (Quartz)
50, 100 mm : - 6.5 x 10-7 / ºC (Neoceram)
*1) Either A,B phase output or up/down pulse output can be exclusively selected.
*2) Comparison measurement with Laser Interference at 23 ºC