TOP > MICRO LASER INTERFEROMETER > DS-80
LASER ROTARY ENCODER
MICRO LINEAR ENCODER
SR ENCODER
INTERPOLATOR BOARD/UNIT
LASER DOPPLER VELOCITY SENSOR
MICRO LASER INTERFEROMETER
• DS-80
LASER SCANNER
ROTARY POSITIONER
AIR BEARING
Contact us

DS-80
High-resolution, High-accuracy, High-speed response

SPECIFICATIONS
Sensor Head
 A-type
 B-type
 C-type
Measurement System
 Michelson interferometer
Light source
 Semiconductor Laser (wavelength 650 nm)
Measuring range
 ± 50 µm
Working distance
 10 mm
 2.5 mm
 53 ± 0.5 mm
Laser spot diameter
 20 x 10 µm
 5 x 2.5 µm
 50 x 25 µm
Alignment tolerance
 ± 0.5 degrees
 ± 2.0 degrees
 ± 0.3 degrees
Resolution
 max. 0.08 nm
Linearity
 less than ± 0.02 % of full scale
Response frequency max. 500 kHz (at 0.1 µm p-p or less)
Object surface
 Mirror reflection surface
Dimensions
 51 x 38 x 19 mm
47 x 38 x 19 mm 53.1 x 49.5 x 20 mm


DSP board unit
Composition Interface Box, DSP board
Bus type
ISA bus or PCI bus
OS Windows95, 98, NT4.0, 2000
Sensor input
2 ch
Displacement output
Graphical Display on screen, Data file
creation (CSV format), Analog voltage output
Sampling speed Real Time mode:
 1 ch: 50 kHz (fixed)
2 ch simultaneous: 25 kHz (fixed)
Storage mode: 1 ch: up to 100 kHz (adjustable)
2 ch simultaneous: up to 50 kHz (adjustable)
Storage data size
max. 30,000 points
External trigger
One sample per trigger, TTL level
Analog output
± 2.5 V
Dimensions Interface Box
 120 x 118 x 30 mm
DSP board 203 x 99.1 mm