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Micro Laser Interferometer

    
 
Laser light emitted from a semi-conductor laser is split into two beams by a beam splitter, one beam being incident on a reference mirror located in the sensor head and the other on the object to be measured.
Both of the reflected beams are then combined when passing back through the beam splitter, and the sensor measures the interference pattern produced by the two differing optical paths.
The bright and dark fringes of the interference pattern are equivalent to 1/2 a wavelength λ. Displacement information is calculated based on conversion of the interference with a special DSP board, making possible high-speed, high-resolution measurement.
While ultra-low-frequency oscillation is naturally measurable with an interferometer, measurement of static displacement is also possible.
The spot diameter of the beam incident on the object to be measured is an extremely small 5 × 2.5 μm (B-type sensor head). This allows measurement even if the surface being measured does not appear reflective, as long as there is sufficient flatness in the tiny area irradiated with the laser spot.