System
name
|
LS-2M40
|
FS-1M100
|
FS-1M28
|
| Component |
Controller
|
LS-2-EU |
FS-1-EU |
FS-1-EU |
| Encoder Motor |
LE-60TM40 |
KP-1SM100 |
LE-60M28 |
Positioning
Performance |
Command Resolution
|
0.33 µrad
|
0.036 µrad
|
|
| Settling Time |
0.666 msec / 7 mrad
(Settling Range : ± 21.4 µrad with 10.0 gcm2
)
|
2.5 msec / 5 mrad
(Settling Range : ± 15 µrad with 10.0 gcm2
)
|
| Repeatability |
10 µrad
|
5 µrad |
| Positioning Thermal Drift |
48.5 µrad / Δ45
ºC
|
48.5 µrad / Δ25
ºC |
Raster
Scanning
Performance |
Scanning Speed |
|
60 Hz with 10.0 gcm2
(typical)
|
60 Hz with 8.0 gcm2
(typical) |
| Scanning Linearity |
0.01 % or less (Full Scale)
|
0.1 % or less (Full Scale) |
| Constant Speed Area |
80 % ( within maximum speed ± 1 % )
|
80 % ( within maximum speed
± 1 % ) |
| Repeatability |
18 µrad p-p with 10.0
gcm2
|
18 µrad p-p with 8.0
gcm2 |
| Environment |
Operating Temperature
|
23 ± 5 ºC
( The temperature inside of motor must be 75 ºC or less
while in operation )
|
23 ± 5 ºC
( The temperature inside of motor must be 55 ºC or less
while in operation )
|
0 to 50 ºC
( The temperature inside of motor must be 75 ºC or less
while in operation ) |
| Operating Humidity |
80 % RH or less ( no condensation
)
|
80 % RH or less ( no condensation
)
|
90 % RH or less ( no condensation
) |
