Canon has now developed a compact, super high-precision laser rotary encoder using semiconductor laser and integrated a motor unit directly. The result is a new high-precision positioning control system. That obtains a sinusoidal wave with 81,000 periods per revolution from the laser rotary encoder and digitally divides it into 4096 parts. This achieves a resolution of 0.0039 angle-seconds. By connecting our system controller equipped with optimum control, higher precision can be attained in positioning.