How lithography equipment works
Semiconductor Lithography Equipment
Supporting the Evolution of the Semiconductor Industry
Semiconductors are constantly evolving. Canon has focused on developing far-sighted technology for semiconductor lithography equipment that meets the strict cutting-edge demands. These technologies serve as the driving force behind Canon's optical and control technologies.
How Semiconductor Lithography Equipment Works
Semiconductor lithography equipment uses a projection lens to reduce and project circuit patterns drawn on the reticle onto silicon wafers. More than ten types of reticles are required to produce a single chip, and this equipment is particularly important in the manufacture of semiconductor chips. Because these tools "step" from one chip to the next to expose the several hundred chip patterns on a single wafer, they are also called "steppers."
FPD Lithography Equipment
Ultra Large-Scale Lithography Technology for Manufacturing Large Screen LCD Televisions
The LCD panels used in large-screen LCD televisions are created with technology that exposes minute pixel circuits on large-scale glass substrates. Canon's Flat Panel Display(FPD) lithography equipment make possible the single-exposure production of widescreen TVs up to 57 inches in size. Canon is the leading manufacturer of this equipment.
How FPD Lithography Equipment Works
FPD lithography equipment transfers fine pixel patterns and circuit patterns drawn on masks onto glass substrates to create liquid crystal display panels for displays and televisions. Canon's FPD lithography equipment employs the company's original mirror-scanning method for optical mirror projection. The light emitted from the light source is controlled using an optical mirror projection system made up of components which include a large concave mirror. Due to their wide exposure range, no chromatic aberration and no deterioration of imaging performance, Canon's FPD lithography equipment achieves high productivity.