In Products > Semiconductor Exposure Equipment
Semiconductor Exposure Equipment
The performance of semiconductors improves on an almost daily basis. The mass production of semiconductor chips with 65 nm (1 nm is one-billionth of a meter) circuit widths is now getting underway. Canon continues to look toward the future as it develops state-of-the-art semiconductor exposure equipment designed to meet the demands of this cutting-edge industry.
A Look at the Basics
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Special features of Canon's products
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Technologies for Semiconductor Exposure Equipment
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