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Semiconductor Exposure Equipment

The performance of semiconductors improves on an almost daily basis. The mass production of semiconductor chips with 65 nm (1 nm is one-billionth of a meter) circuit widths is now getting underway. Canon continues to look toward the future as it develops state-of-the-art semiconductor exposure equipment designed to meet the demands of this cutting-edge industry.

Semiconductor Exposure Equipment

How Semiconductor Exposure Equipment Work

A Look at the Basics
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Special features of Canon's products
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Technologies for Semiconductor Exposure Equipment

Supporting Enhanced Equipment Use Rates Through Proactive Problem Prevention

EE Support Program

Supporting the World's Leading Overlay Accuracy and Throughput

Ultraprecision Positioning Technology

Pushing the Limits of Miniaturization with Water and ArF Excimer Lasers

Immersion Exposure Technology

Seeking to Reach Beyond the World of Light

Next-Generation Exposure Technology


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