For Ultra-Sensitive Displacement Detection at 0.08 nm
Micro Laser Interferometer
The manufacture of hard-disk devices used in digital consumer electronics requires the detection of microvibrations (displacements) on the surface or the shaft of a disk that directly affect the recording density. Using a semiconductor laser as a light source, laser interferometers employ a noncontact method to measure slight displacements and vibrations on the object's mirror reflection.
Micro Laser Interferometer
Canon developed a microlaser interferometer based on the Michelson interferometer method that achieves an ultrahigh resolution of 0.08nm.* The unique optical design has enabled the development of a light and compact interferometer weighing about 50 grams and measuring a mere 38 mm(W) x 47 mm(D) x 19 mm(H). This dramatic size reduction enables the interferometer to be used in piezo-electric measurement equipment, wafer-stage position controllers for EB (Electron Beam) lithograpy, and microvibration analyzers of precision driving machines.
*nm (nanometer): one billionth of a meter
