Galvano scanners are a critical component for patterning on high-density, multi-layer substrates for the manufacture of mobile phones and other devices. Laser beam scanning on high-density substrates requires the high-speed, high-precision control of mirror angles.

Canon's galvano scanner, which combines the company's proprietary optical rotary encoder technology and fully closed digital servo technology, achieves high positioning resolution and high-speed scanning with a repetitive reproduction capability (index of precision) of 2.5µradian.* This level of precision would make possible the accurate targeting of a basketball located 100 km away. Also, since the sensor achieves minimal drift due to temperature variations, it enables expanded application in areas where reliability and environmental stability are critical.
*radian: 1µradian = 0.000057 degrees (unit of angle)

Example of Galvano Scanner Application: Laser Via-Hole Drilling