Manufacturing large LCD panels requires large exposure areas.

Forming fine patterns over such large areas with micrometer-level precision requires lithography tools equipped with large-diameter, high-precision concave mirrors.

By making use of extremely sophisticated technologies, including processing, measurement, polishing, and high-precision metal-vapordeposition technologies, Canon successfully developed the world's largest ultra-high-precision concave mirror, measuring 1,514 mm in width with surface-processing accuracy of 0.015 µm. This mirror makes possible the manufacture of 57-inch widescreen LCD TV panels through a singleexposure process.