Initially measuring a mere 320 mm x 400 mm around 1989, glass substrates for LCD panels have grown rapidly in recent years, reaching dimensions of 2,160 mm x 2,460 mm in the current eighth generation. The projection system employed in Canon's mirror projection aligners incorporates a large concave mirror, twice the diameter of conventional mirrors, and a large stage capable of moving 50% faster than conventional stage systems, enabling the full-field exposure of the world's largest substrate size: 2,160 mm x 2,460 mm. With external body dimensions measuring 8,360 (W) x 9,300 (D) x 5,394 (H) mm and weighing 88 tons, the enormous MPA-8800 is Canon's largest product.

By itself, the stage that supports and moves glass substrates during exposure weighs 3.9 tons. This stage, which uses vacuum suction to secure glass substrates measuring 0.7 mm in thickness with a surface area of roughly 5 m², employs linear motors to drive the panels. Laser interference sensors control the position and rotation of the stage with remarkable precision. The stage, which achieves a speed of 700 mm per second in just 0.5 seconds once motion has been initiated and comes to a complete stop in a mere 0.2 seconds upon arriving at the stop position, ensures an extraordinary level of precision during the exposure of glass substrates.

Combining the benefits of large-substrate handling with a high-speed stage, the MPA-8800 enables the simultaneous exposure of six 52-inch widescreen LCD TV panels to make possible a fast throughput rate of 260 panels per hour.