Key Technology > Production Engineering Technologies > Processing and Measurement System Technologies
Realizing Nanometer Level Precision in Optical Elements
Processing and Measurement System Technologies
Optical elements like lenses and prisms continue to evolve with advances in design technologies, from spherical to aspherical shapes, and from axisymmetric to free-form surfaces. In the case of optical elements that demand nanometer-order levels of precision (a nanometer is one millionth of 1mm), conventional production technologies are incapable of achieving free-form surfaces involving large curvature differences. Such applications require the development of new processing and measurement systems.

Free-Form Processing Machine (A-Former)
For its free-form processing machine, Canon developed various proprietary technologies to enable the high-precision control of the highspeed cutting tool, including highly rigid air bearings and a highperformance controlling system. The company's free-form measurement machine, which makes possible the ultra high-precision measurement of the entire surface of optical elements through contact probes that are in contact with the element, also employs a variety of advanced technologies. A metrology box with a unique box-shaped structure provides the system's precision standard while a laser interferometer comprising a work guide sandwiched between six mirrors is used to cancel contact-probe motion errors, making possible measurements of nanometer-order precision.

Free-Form Measurement Machine (A-Ruler)
